Dr. Giorgio Casinovi – Publications
Lamb Waves and Resonant Modes in Rectangular Bar Silicon Resonators
G. Casinovi, X. Gao and F. Ayazi
IEEE/ASME Journal of Microelectromechanical Systems
vol. 19, no. 4, pp. 827–839, August 2010
Abstract
This paper presents two newly developed models of capacitive
silicon bulk acoustic resonators (SiBARs) characterized
by a rectangular bar geometry. The first model is derived
from an approximate analytical solution of the
linear elastodynamics equations for a parallelepiped made of
an orthotropic material. This solution, which is recognized
to represent a Lamb wave propagating across the width of the
resonator, yields the frequencies and
shapes of the resonance modes that typically govern the
operation of SiBARs. The second model is numerical and is based
on finite-element, multi-physics simulation of both acoustic
wave propagation in the resonator and electromechanical
transduction in the capacitive gaps of the device. It is
especially useful in the computation of SiBAR performance
parameters that cannot be obtained from the analytical model,
e.g. the relationship between transduction area and insertion
loss. Comparisons with measurements taken on a set of silicon
resonators fabricated using electron-beam lithography show
that both models can predict the resonance frequencies of SiBARs
with a relative error that in most cases is significantly smaller
than 1%.
 |
Full text |
Last revised on January 14, 2014.