Dr. Giorgio Casinovi – Publications
Compact Parametric Model of Capacitive BAW Resonators
G. Casinovi, A.K. Samarao and F. Ayazi
Joint Conference of the IEEE International Frequency Control
Symposium and the European Frequency and Time Forum
pp. 127–130, May 2011
Abstract
This paper presents a new equivalent-circuit model of
SiBARs, derived in a mathematically rigorous way from the
physics equations governing the behavior of the device. The
model is parametric, that is, the model component values can be
computed directly from the dimensions of the resonator and the
properties of the material. The model also accounts fully,
accurately and automatically for aspects of the device behavior
that arise from the interaction of multiple physics domain: the
shift in the resonance frequency with the polarization voltage
(spring softening), the effect of the polarization voltage and
gap size on the insertion loss, and the reduction in the resonator
loaded Q as the polarization voltage is increased. In contrast,
those effects are not automatically accounted for by other
models, such as mass-spring combinations. Finally, the model
described is load- and source-independent, and thus it
reproduces accurately the behavior of the device itself,
regardless of the type and characteristics of the surrounding
circuitry.
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Last revised on January 14, 2014.