Dr. Giorgio Casinovi – Publications
Novel Readout Scheme for MEMS Vibratory Gyroscopes Based on Signal Phase Shift
M. Dalal, A. N. Shirazi, W. K. Sung, G. Casinovi and F. Ayazi
Solid-State Sensors, Actuators and Microsystems Workshop
pp. 328–331, June 2012
Abstract
This paper introduces and demonstrates experimentally a new
readout scheme for MEMS vibratory gyroscopes that relies on
signal phase instead of signal amplitude to measure the rotation
rate. When the drive and sense resonance modes of the gyroscope
are both excited by forces of equal intensity and 90° phase
difference, the Coriolis force induces a phase shift in the
gyroscope response that is proportional to the gyroscope rotation
rate. This effect is predicted by theoretical analysis and has
been verified through simulation and measurement of two different
gyroscopes, a high-frequency bulk acoustic wave (BAW) disk gyroscope,
and a low-frequency mode-matched tuning fork gyroscope (M2‑TFG).
The two gyroscopes report a measured phase sensitivity of
0.597 mV/°/s and 0.148 mV/°/s, respectively.
The linear response observed on both devices supports the use of
the phase readout architecture as a valid measurement scheme.
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Last revised on January 14, 2014.